Poster

Reactive magnetron sputter technologies for precision optical coatings
P. Frach, H. Bartzsch, D. Glöß, K. Täschner, J.-S. Liebig

Hollow cathode arc enhancement in reactive PVD processes
B. Zimmermann, F. Fietzke, G. Mattausch
[537th Wilhelm and Else Heraeus Seminar, Dresden, Germany]

Synthesis and Deposition of Metal Nanoparticles by Gas Phase Condensation (GPC) Process
M. Maicu, R. Schmittgens, D. Hecker, D. Glöß, P. Frach, G. Gerlach
[ISSP 2013, Kyoto, Japan]

Sputter deposition of piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
D. Glöß, S. Barth, H. Bartzsch, P. Frach, T. Herzog, S. Walter, H. Heuer, G. Suchaneck, G. Gerlach, J. Juuti, J. Palosaari
[Energy Harvesting: A metrological approach, Braunschweig, Germany]