Precision coating

We develop processes and technologies to precisely and homogenously apply electrical, optical, acoustic, and magnetic layers and layer systems on large areas. This provides the basis for new products in the area of optics, electronics, sensor technology, photovoltaic systems, storage media, and biomedical technology.

For our customers we develop favorable-cost technologies for manufacturing innovative products, where combinations of different layer properties essentially determine the product properties. The long-term stable sputtering processes are ideally suited for manufacturing precise layer systems.

The services we provide cover customized development of key components, processes and layer systems right through to scale-up and transfer of integrated packages of hardware and technology into production.

Our offer

  • development and optimization of coating technologies and layer systems for your application
  • development of key components (magnetron sputtering sources, plasma etching units) customized to the requirements of the specific coating task
  • sample coatings and pilot production
  • transfer of integrated packages (comprising key components, fully automatic control and regulating technology) to production plants
  • evaluation of costs and support in the scale-up phase

Technologies

  • high-rate magnetron sputtering (DC, MF, RF) with long-term stability suitable for a range of layers such as metals, alloys, compounds, layer systems and gradient layers
  • reactive pulse magnetron sputtering for multi-component compound and gradient layer systems
  • coating processes for stationary and in-line substrates
  • high-rate PECVD

Product examples

  • layer systems and gradient layers for precision optical elements (filters, mirrors)
  • antireflective and antireflective-antistatic coatings for optical components having high requirements on stress reduction and climatic resistance (spectacle lenses, optics)
  • layer systems and gradient layers for precision optical elements (filters, mirrors, DWDM)
  • AR and ARAS coatings for optical components having high requirements on stress reduction and climatic resistance (spectacle lenses, optics)
  • active acoustic layers on surface wave elements
  • layers and layer systems for magnetic and optical storage media (hard disks, CD, DVD)
  • mechanical layer systems for magnet heads and sensors
  • layer systems for electrical contact and diffusion barriers in electronic components for use at elevated temperatures
  • electrical insulator, barrier and other functional layers for sensors (e.g. gas sensors)
  • photo-catalytic layers and insulator and barrier layers for components for biotechnology and medical technology
  • piezoelectric layers for ultrasound microscopy and for micro-energy harvesting

Applications

  • Al2O3 insulating layer for pressure sensors
  • SiO2 temperature compensation layer for surface wave elements
  • SiXOYNZ gradient layer system for Rugate filters and IR edge filters
  • Magnetron sputter station for stationary reactive coating of 8“ substrates
  • Magnetron sputter station for CD coating