Fraunhofer Institute for Electron BeamWorkshop / December 03, 2025
27. Workshop der GMM-Nutzergruppe "Abscheide- und Ätzverfahren"
Presentation
Sputter deposition of dielectric films for photonics, MEMS and power electronics using the Double Ring Magnetron
Wednesday, December 3
Contact Press / Media
Dr. Hagen Bartzsch
Group Manager Static Precision Coating
Fraunhofer FEP
Winterbergstraße 28
01277 Dresden
Phone +49 351 2586-390