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PRODID:-//Fraunhofer-Gesellschaft//Fraunhofer Institute for Electron Beam<b
 r/>and Plasma Technology FEP//EN
BEGIN:VEVENT
UID:2bc553c0-653f-41de-96e7-74d2bc814190
DTSTAMP:20260730T115401Z
SUMMARY:International Workshop on Magnetron Sputter Epitaxy 2026
DTSTART:20261005T220000Z
DTEND:20261006T220000Z
END:VEVENT
END:VCALENDAR