BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//Fraunhofer-Gesellschaft//Fraunhofer Institute for Electron Beam<b
 r/>and Plasma Technology FEP//EN
BEGIN:VEVENT
UID:9470d03d-cc6f-42ee-ac08-e047b1d9b699
DTSTAMP:20261026T193253Z
SUMMARY:International Workshop on Magnetron Sputter Epitaxy IWMSE 2026
DTSTART:20261005T220000Z
DTEND:20261006T220000Z
END:VEVENT
END:VCALENDAR