Conference / April 29, 2013 - May 03, 2013
40th International Conference on Metallurgical Coatings and Thin Films ICMCTF
Lecture
Prof. Dr. C. Metzner
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
»High-rate PECVD with metal strip magnetron for hard and other functional coatings«