Equipment

The institute is equipped with several pilot plants for large-area coating (batch, in-line or roll-to-roll processes), electron beam equipment for the efficient modification of surfaces and several clean rooms for the development and pilot production of organic electronics, sensors and microdisplays. Using these plants we can refine flat substrates made from glass, plastics or metal as well as flexible surfaces like metal strips, polymer films or flexible ultra-thin glass as well as 3-dimensional components. The equipment technology in the clean rooms enables coating on 200 mm wafers as well as on glass or film substrates up to 200 x 200 mm² with e. g. organic electronics.

Coating of flat substrates

ILA 900 Vertical in-line sputtering plant for coating large surfaces
ILA 750 Vertical in-line sputtering plant

Coating of flexible substrates

novoFlex®600 Roll-to-roll pilot web coater
coFlex® 600 Roll-to-roll pilot sputter roll coater
labFlex® 200 Lab sputter roll coater
vapoFlex Laboratory coater
atmoFlex 1250 Roll-to-roll pilot wet coating line
FOSA LabX 330 Glass Web coating system for flexible substrates (in cooperation with VON ARDENNE GmbH)

Coating of sheets and metal strips

MAXI
In-line vacuum coating equipment for sheets and metal strips
EMO Laboratory coater with EB evaporator
VERSA Pilot plant for plasma-enhanced electron-beam vapor deposition
CLAIRE
In-line plant for wet chemical surface treatment priot to coating

Electron beam applications

REAMODE Experimental equipment for modifying organic materials using accelerated electrons
ERICA
Vacuum cluster tool for complex coating and structuring processes
EFFI
Electron beam machine for surface structuring and for fine and micro welding processes
CLAIRE In-line plant for wet chemical surface treatment prior to coating
TABEA Mobile test rig for electron beam-based environmental technologies

Coating of components

ALMA 1000 Experimental plant for coating bulk goods via plasma-activated high-rate deposition
UNIVERSA Laboratory coater for layer deposition by means of pulse magnetron sputtering
NOVELLA Facility for coating 3D components

Precision coating

CLUSTER 300
Plant for stationary magnetron sputtering
PreSensLine In-line sputtering system for precision coating of large substrates
LB nano Vacuum coating equipment

Parts of the equipment have been funded by the European Union and the Free State of Saxony.