Annual Report 2022/23

© Fraunhofer FEP / Photographer: Ronald Bonß

Dear partners of Fraunhofer FEP,
Dear readers,

In 2021, I took over the directorship of the Fraunhofer FEP and last year’s annual report reflects our excitement and optimism towards new horizons, projects and plans. In 2022, as an institute we began to implement many of the planned steps, but also had to overcome some unexpected new hurdles. In February 2022, Prof. Kirchhoff handed over the baton of institute direction me, and I am grateful for the six months that we spent together leading the Fraunhofer FEP. In parallel, I started to establish the Chair of Coating Technologies for Electronics at the TU Dresden. This has already created a promising basis for future synergies and joint research, for example in the field of energy research and semiconductor technologies. The first employees have been recruited for the purpose of promoting the exchange and expansion of scientific excellence at the institute. Furthermore, the researchers at the institute contribute their expertise within various networks, such as the innovation cluster HZwo on the topic of hydrogen or the cluster of excellence CeTI of the TU Dresden on the tactile internet. I am particularly pleased that in 2023 one of our PhD candidates received one of the prestigious scholarships to conduct research in the field of hydrogen technologies at the TU Dresden within a project funded by the Boysen Foundation.
Despite initial uncertainties, which also accompanied us in 2022 due to the global pandemic situation, we succeeded in acquiring several major projects within the framework of public funding at the state, federal and EU levels. For example, the implementation phase of the »EdgeVision« project was approved as part of the federal government‘s RUBIN funding (Regional Entrepreneurial Alliances for Innovation). This is the cornerstone for the establishment of a regional network for the development of a high-performance ultra-low-power edge AI, visualization and sensor platform for secure IoT and human-technology interaction in Eastern Saxony.

Thanks to great efforts by our FEP scientists, we have succeeded in acquiring new projects with industrial partners from Germany as well as worldwide, which contribute greatly to the stable financing of the institute. In this context, the division Microdisplays and Sensors acquired the third largest industrial contract in the Fraunhofer-Gesellschaft in 2022.

To assure all necessary processes, especially in administration and project controlling, major challenges had to be mastered in the past year. The introduction of a fully comprehensive SAP portfolio in January entailed a large number of changes and high additional workloads for the entire staff. All of the Fraunhofer FEP employees have my gratitude and admiration for their incredible patience, cooperation, willingness to learn and flexibility in finding short-term solutions to safeguard daily operations.

In the hot summer, after a long break, we were finally able to open our doors to the public again and to show our research to many interested visitors during the Dresden Long Night of Science. Afterwards, we restarted our presence at major trade fairs, e. g. at ACHEMA and electronica - the world‘s leading trade fairs for process industry and electronics, respectively. Fraunhofer FEP‘s new research results were also discussed live with great interest at several specialist conferences such as BIOEurope. Topics such as effective metal extraction with electron-stimulated microorganisms by bioleaching or the modular AR service platform for industrial manufacturing attracted a wide range of interest.

As a passionate cyclist, it was my particular pleasure to join our colleagues and all of Dresden‘s Fraunhofer Institutes in cycling to a respectable 6th place in the city cycling competition in the fall of 2022. But it is not only with our research – e. g. on thin-film technologies for the energy transition for smart windows – or by cycling that we want to contribute to a good climate. When we built our new laboratories on Bodenbacher Straße, great emphasis was put on the use of energy-saving technology and materials right from the start. Fraunhofer FEP is also the first institute in the entire research landscape in Germany with a certified energy management system!

In 2022 Fraunhofer FEP started a strategy process, and we will present the results in 2023 to an external committee. The goal was to engage a large number of colleagues from all departments in this process to define a roadmap for the next five years. We are focusing on the scientific divisions, as well as organizational topics ranging from IT to human resources. Our aim is to define sustainable approaches to prepare our institute for the future, and to establish a platform on which we can continually reorient ourselves according to the needs of our customers and partners, to changing external circumstances, with to the well-being of our employees.

Finally, I would like to thank all our employees as well as our funding bodies and industry and academic partners for their continued great trust, support, and cooperation!

In our annual report we go into depth on the highlights from the last 12 months. Enjoy reading and I look forward to continued good cooperation!


Research News


Fraunhofer FEP was able to bring in 12.1 million € of new business from industry through direct contracts. Proceeds of 9.2 million € were obtained from public projects funded by the federal and state governments. A portion of these, amounting to 3.8 million €, was attracted through joint publicly funded projects with mid-cap companies. The expenditure of institutional capital ran to 7.1 million €.

Employee development

197 staff members were employed at the institute during the past year, of which 9 were trainees, along with 25 student trainees as well as 37 scientific assistants. Of the 75 staff members that were employed as scientists, 13 were additionally working on their doctoral degrees. The proportion of females in the scientific area amounted to 26 percent.

Investment costs

Total expenditures from the operating and investment budget amounted to 28.4 million €. 1.2 million € was invested in equipment, construction and infrastructure during the period.


Staff and material costs

Personnel expenditures totaled 14.6 million €, representing 53.6 percent of the operating budget (27.2 million €). Material costs amounted to 12.6 million €.

F.-H. Rögner, M. Pfeilschifter
Market and Trend Analysis in Industrial Parts Cleaning 2020  
Fraunhofer FEP, ISBN: 978-3-00-069602-2 , 2022

J. Fertey, B. Standfest, J. Beckmann, M. Thoma, T. Grunwald, S. Ulbert
Low-energy electron irradiation (LEEI) for the generation of inactivated bacterial vaccines
Bacterial Vaccines, Methods and Protocols, ISBN: 978-1-0716-1899-8 , 2022, page 79 -113

F.-H. Rögner, G. Schottner, W. Grählert, F. Gruber, T. Fuchs, J. Hügle
Historical Paper Documents
Fraunhofer Technologies for Heritage Protection in Times of Climate Change and Digitization, ISBN: 978-3-7388-0787-5 , Chapter 3, Abschnitt 2, S. 81 - 88

V. Franke, F. Gruber, O. Zywitzki, T. Fuchs
Fraunhofer Technologies for Heritage Protection in Times of Climate Change and Digitization, ISBN: 978-3-7388-0787-5, S. 89 - 94

S. Neuhaus, H. Bartzsch, S. Cornelius, A. Hinz, S. Pingen, P. Frach
Bipolar pulsed reactive magnetron sputtering of epitaxial AIN-films on Si(111) utilizing a technology suitable for 8" substrates
Surface and Coatings Technology, Vol. 429, 2022, Artikel 127884

T. Furukawa, J. Hauptmann, T. Nakagaki, R. Ikeuchi, M. Sagawa, D. Nagata, J. Nakatsuka
Roll-to-Roll Fabrication for OLED Lighting Using Ultra-Thin Glass Substrate and Encapsulating Stainless Steel Foil
Proceedings of the International Display Workshops, Volume 28, 2022, page 948 - 951

E. Metzner, C. Bäumer, C. Behrends, A. Dammene Debbih, D. Döhler, M.J. v. Goethem, E.R. v. der Graat, P. Kahle, A. Lühr, T. Teichmann, B. Timmermann, D. Weinberger, T. Werner, J. Wulff, T. Kormoll
Spectral fiber dosimetry with beryllium oxide for quality assurance in hadron radiation therapy
Journal of Instrumentation, Vol. 17, 2022, IOP Publishing, Artikel P02009

L. Steinhäußer, G. Gotzmann, F. Fietzke, J.-M. Albrecht, U. König
Oberflächenhygienisierung durch UV-aktivierbare Beschichtung
JOT-Journal, Vol. 62, 2022, S. 34 - 37

M. C. Nelson, L. Rothberg, M. Wieczorek
Low Onset Stimulated Emission in Electrically Pumped Organic Light Emitting Diodes
ACS Photonics, Vol. 9, Issue 2, 2022, p. 511 - 517

D. Chaykina, F. Nafezarefi, G. Colombi, S. Cornelius, L. J. Bannenberg, H. Schreuders, B. Dam
Influence of Crystal Structure, Encapsulation and Annealing on Photochromism in Nd Oxyhydride Thin Films
Journal of Physical Chemistry C, Vol. 126, Issue 4, 2022, p. 2276 - 2284

E. v. Hauff, D. Klotz
Impedance spectroscopy for perovskite solar cells: Characterisation, analysis and diagnosis
Journal of Materials Chemistry C, Vol. 10, Issue 2, 2022, p. 742 - 761

S. Walker, A. Jakob, C. Dittfeld, J. Schönfelder, U. König, S.-M. Tugtekin
Sterilization and Cross-Linking Combined with Ultraviolet Irradiation and Low-Energy Electron Irradiation Procedure: New Perspectives for Bovine Pericardial Implants in Cardiac Surgery
The Thoracic and Cardiovascular Surgeon, Vol. 70, Issue 1, 2022, p. 33 - 42

S. Maity, C. Ramanan, F. Ariese, R. C. I. MacKenzie, E. v. Hauff
In Situ Visualization and Quantification of Electrical Self-Heating in Conjugated Polymer Diodes Using Raman Spectroscopy
Advanced Electronic Materials, Vol. 8, Nr. 7, 2022, Artikel 2101208

J. Rezek, J. Szelwicka, J. Vlček, R. Čerstvý, J. Houška, M. Fahland, J. Fahlteich
Transfer of the sputter technique for deposition of strongly thermochromic VO2-based coatings on ultrathin flexible glass to large-scale roll-to-roll device
Surface and Coating Technology, Vol. 442, 2022, Artikel 128273

P. Wartenberg, S. Brenner, M. Thomschke, G. Bunk, A. Fritscher, B. Richter, S. Lenk, U. Vogel
New ultra-low power OLED microdisplays for slim near-to-eye visualization
SPIE Proceedings, Vol. 12024, 2022, Advances in Display Technologies XII, SPIE OPTO, San Francisco, USA

J. Finkensieper, L. Issmail, J. Fertey, A. Rockstroh, S. Schopf, B. Standfest, M. Thoma, T. Grunwald, S. Ulbert
Low-Energy Electron Irradiation of Tick-Borne Encephalitis Virus Provides a Protective Inactivated Vaccine
Frontiers in Immunology, Vol. 13, 2022, Artikel 825702

C. Stoeckel, K. Meinel, M. Melzer, A. Zukauskaite, S. Zimmermann, R. Forke, K. Hiller, H. Kuhn
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
micromachines, Vol. 13, Nr. 625, 2022, Artikel 13040625

S. Hamid, D. Heberling, M. Junghähnel, T. Preußner, P. Gretzki, L. Pongratz, C. Hordemann, A. Gillner
Development of a millimeter-wave transparent antenna inside a headlamp for automotive radar application
Microwave and Wireless Technologies, Vol. 14, Nr. 6, 2022, p. 677 - 688

S. Schopf, G. Gotzmann, M. Dietze, S. Gerschke, L. Kenner, U. König
Investigations Into the Suitability of Bacterial Suspension as Biological Indicators for Low-Energy Irradiation
Frontiers in Immunology, Vol. 13, 2022, Artikel 814767

L. Steinhäußer, U. König, T. Mally, T. Westerhoff
Simulation based design of an UVC-LED emitter for disinfection of high-touch environmental surfaces
IEEE Proceedings of 17 th International Symposium on the Science and Technology of Lighting, Toulouse, Frankreich, 01. - 03. Juni 2022

R. Wang, S. Hasanefendic, E. v. Hauff, B. Bossink
The cost of photovoltaics: Re-evaluating grid parity for PV systems in China
Renewable Energy, Vol. 194, 2022, p. 469 - 481

D. Glöß, U. Hartung, A. Drescher, J. Neidhardt, P. Frach, H. Bartzsch, H. Sahm, P. Büttner 
Inline Magnetron Sputtering for Optical Filters on Flat and Curved Glass Substrates
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P. Wartenberg, A. Fritscher, S. Brenner, B. Richter, S. Lenk, M. Rolle, J. Baumgarten, K. Fehse, C. Schmidt, U. Vogel
New Ultra Low-Power High Brightness Microdisplays Enabling Broad Application
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F.-H. Rögner
Berufsausbildung für die industrielle Teilereinigung
Journal für Oberflächentechnik, JOT, Vol. 62, Issue 3, 2022, S. 15 - 17

N. Stöckl, E. Bittrich, M. Top
Effect of deposition temperature on the residual stress of sputtered Zinc-Tin-Oxide coatings deposited on polyethylene terephthalate (PET) substrates
Surface & Coatings Technology, Vol. 445, 2022, Artikel 128723

D. Döhler, L. Alshut, L. König, T. Teichmann, T. Werner, T. Kormoll
Characterization of a Fiber Optic Radiation Sensor Prototype for Nuclear Dismantling
IEEE Transactions on Nuclear Science, Vol. 69, Nr. 8, 2022, S. 1884 - 1892

N. Wolff, M. R. Islam, L. Kirste, S. Fichtner, F. Lofink, A. Žukauskaitė, L. Kienle
Al1-xScxN thin films at high temperatures: Sc-dependent insta-bility and anomalous thermal expansion
micromachines, Vol. 13, Nr. 8, 2022, Artikel 1282

S. Günther, E. Kutschke, A. Bork
Polymeric substrate properties tailored by irradiation
Vakuum in Forschung und Praxis, Vol. 34, Issue 4, 2022, S. 26 - 30

S. Saager, L. Decker, T. Kopte, B. Scheffel
PVD of Metallic Lithium Layers and Lithiated Silicon Layers for High-Performance Anodes in Lithium Ion Batteries
Proceedings of 65th Annual SVC TechCon, Long Beach, USA, 02. - 05. Mai 2022, p. 72 - 78

J. P. Heinß, L. Klose
High-rate Sputter Etching of Substrates using Hollow-Cathode Arc Discharge Sources
Proceedings of 65th Annual SVC TechCon, Long Beach, USA, 02. - 05. Mai 2022, p. 205 - 210

M. Fahland, M. Top, T. Vogt
Time Series Analysis in Vacuum Roll to Roll Coating Technology
Proceedings of 65th Annual SVC TechCon, Long Beach, USA, 02. - 05. Mai 2022, p. 246 - 249

A. Delan, M. Becker, M. Boer, K. Liefeith, M. Frant, J. Rost, U. Schirmer, C. Pietsch, D. Glöß, M. Günther, G. Gerlach        
Impedimetrischer Inline-Biofilmsensor
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S. Buchwalder, A. Borzi, J. Diaz Leon, F. Bourgeois, C. Nicolier, S. Nicolay, A. Neels, O. Zywitzki, A. Hogg, J. Burger
Thermal Analysis of Parylene Thin Films for Barrier Layer Applications
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S. Barth, T. Schreiber, S. Cornelius, O. Zywitzki, T. Modes, H. Bartzsch
High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area
micromachines, Vol. 13, Nr. 10, 2022, Artikel 1561

A. Nair, M. Kessel, L. Kirste, N. M. Feil, M. Prescher, A. Žukauskaitė
Growth optimization of non-polar Al0.7Sc0.3N(1120)/Al2O3(1102) thin films using reactive magnetron sputter epitaxy
Physics Status Solidi Applications and Materials Science, Open Access, 2022

N. Tulus, L. A. Muscarella, Y. Galagan, S. C. Boehm, E. v. Hauff
Trap passivation and suppressed electrochemical dynamics in perovskite solar cells with C60 interlayers
Electrochimica Acta, Vol. 433, 2022, Artikel 141215

H. K. Bangolla, M. D. Siao, Y. H. Huang, R. S. Chen, A. Žukauskaitė, J. Pališaitis, P. Persson, L. Hultman, J. Birch, C. L. Hsiao
Composition-dependent Photoconductivities in Indium Aluminium Nitride Nanorods Grown by Magnetron Sputter Epitaxy
Nanoscale Advanced, Vol. 4, Nr. 22, 2022, p. 4886 - 4894

S. Moench, J. Meyer, A. Žukauskaitė, V. Lebedev, S. Fichtner, J. Su, F. Niekiel, T. Giese, L. Thormählen, E. Quandt, F. Lofink
AlScN-based SAW Magnetic Field Sensor for Isolated Closed-Loop Hysteretic Current Control of Switched-Mode Power Converters
IEEE Sensors Letters, Vol.6, Issue 10, 2022, Artikel 2500904

E. A. Mayer, O. Rogall, A. Ding, A. Nair, A. Žukauskaitė , P. D. Pupyrev, A. M. Lomonosov, A. P. Mayer
Laser ultrasound investigations of AlScN(0001) and AlScN(11-20) thin films prepared by magnetron sputter epitaxy on sapphire substrates
micromachines, Vol. 13, Nr. 10, 2022, Artikel 1698

F.-H. Rögner
Mikroproduktion – ohne anforderungsgerechte Reinigung nicht denkbar
Zeitschrift Mikroproduktion, Nr. 5, online, 2022, 5 S.

A. Graf, S. Barth, U. Vogel, M. Fahland
Mit Präzision und dünnen Schichten zu tragbarer Elektronik
inno, Vol. 82, 2022, Seite 1 - 3

D. Solonenko, A. Zukauskaite, J. Pilz, M. Moridi, S. Risquez
Raman spectroscopy and spectral signatures of AlScN/Al2O3
micromachines, Vol. 13, Nr. 11, 2022, Artikel 1961

S. Barth, H. Nizard, J. Göller, P. Spieß, H. Bartzsch
AlScN-Dünnschichten auf Metallsubstraten für Energy Harvesting Anwendungen
GMM-Fachbericht Nr. 102, 2022, Beiträge zur 11. GMM-Fachtagung EASS, Erfurt, Deutschland, 05./06. Juli 2022, ISSN: 1432:3419, S. 62 - 64

C. Welzel, U. König, A. Jannasch, K. Matschke, S.-M. Tugtekin, C. Dittfeld, G. Steiner
Infrared Spectroscopic Verification of a α-Helical Collagen Structure in Glutaraldehyde-Free Crosslinked Bovine Pericardium for Cardiac Implants
life, Vol. 12, 2022, Artkel 2035

N. Gürtler, U. König
Low-Energy Electron Beam for Antifouling Coatings
inno, Vol. 83, 2022, Seite 8

M. Günther, A. Delan, M. Becker, M. Boer, K. Liefeith, M. Frant, J. Rost, U. Schirmer, C. Pietsch, D. Glöß, G. Gerlach
Impedimetric Sensors for Monitoring Bacterial Contaminations in Water Pipes
IEEE Proceedings of International Workshop on Impedance Spectroscopy IWIS 2022, Chemnitz, Deutschland, 27. - 30. September 2022, p. 50 - 55

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