Konferenz / 29. April 2013 - 03. Mai 2013
40th International Conference on Metallurgical Coatings and Thin Films ICMCTF
Vortrag
Prof. Dr. C. Metzner
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
»High-rate PECVD with metal strip magnetron for hard and other functional coatings«