Sächsisches Staatsministerium für Wirtschaft, Arbeit und Verkehr
Funding reference: 100297970/3103
Duration: 01.07.2017 - 30.06.2019
Aluminium-rich titanium aluminium nitride coatings, which predominantly contain hard cubic phases, offer significantly better wear resistance compared to titanium aluminium nitride coatings with lower aluminium contents. With conventional PVD processes, such as magnetron sputtering or the arc process, predominantly cubic and stoichiometric titanium aluminum nitride coatings with an aluminum concentration > 32 at.% cannot be produced so far. In contrast, such aluminium-rich cubic titanium aluminium nitride layers can be deposited on hard metal substrates using a thermal CVD process. However, the reasons for the stabilization of the cubic phase in the CVD process at very high aluminum contents have not been clarified. Therefore, the relevant stabilization mechanisms shall be investigated, concepts for the improvement of the deposition of layers for the CVD process as well as for the considered PVD processes shall be developed, experimentally tested and the resulting layer and application properties shall be determined. The overall aim of this project is to investigate the mechanisms of CVD deposition in greater detail, to significantly improve the application properties of the titanium aluminium nitride coatings deposited by the PVD processes and to test PVD processes with a higher deposition rate and better coating properties.