Conference / 26. Oktober 2014 - 28. Oktober 2014
ebeam 2014
Vortrag
Dr. B. Zimmermann
Fraunhofer FEP
»Plasma-Based Electron Sources - A Toolbox for High-Rate PVD Technologies«
Vortrag
Dr. G. Mattausch
Fraunhofer FEP
»Toroidal EB Source for Simplified All-Side Electron Treatment of Parts and Bulk Goods«