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Fraunhofer Institute for Electron Beam
and Plasma Technology FEP
Fraunhofer Institute for Electron Beam
and Plasma Technology FEP
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Electron beam technologies
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PolAR
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Roll-to-roll Competence Centre
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Flash Lamp Annealing
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Biomedical laboratory complex
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Sputter epitaxy
Plasma chemistry
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Equipment
Sheet-to-Sheet In-line Equipment
PreSensLine
ILA 900
ILA 750
MAXI
Roll-to-Roll In-line Equipment
novoFlex
coFlex
labFlex
atmoFlex
Rolle-zu-Rolle Inspektionssystem
FOSA LabX
Single Substrate Coating Equipment
Cluster 300
EMO
VERSA
3D Coating Equipment
ALMA 1000
UNIVERSA
NOVELLA
Further Process Equipment
REAMODE
ERICA
EFFI
TABEA
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Equipment
3D Coating Equipment
3D Coating Equipment
Experimental plant for coating bulk goods »ALMA«
via plasma-activated high-rate deposition
More Info
Laboratory coater for 3D layer deposition »UNIVERSA«
by means of pulse magnetron sputtering
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Pilot plant for the coating of components »NOVELLA«
More Info
Fraunhofer Institute for Electron Beam