Fraunhofer Institute for Electron BeamUltra-pure nanoparticles, sputter and PECVD nanocomposite co-deposition setup
LB nano
Introduction
The LB nano platform combines nanoparticles (NPs) synthesis and matrix deposition in a single vacuum vessel, enabling the production of Safe and sustainable by design (SSbD) nanocomposite coatings that cannot be achieved by wet-chemistry routes.
Metal NPs of 2 – 50 nm diameter and purity ≥ 99.999% are synthesised ligand-free and embedded into functional matrix layers (oxide, polymer, or hybrid) without any liquid, solvent, or organic contaminant.
The result is a class of nanocomposite thin films with tunable optical, catalytic, electrical, and antibacterial properties on large substrates, including flexible webs and thermally sensitive foils.
Established accademic and industrial partner-ships make LB nano the reference platform in Europe for gas-aggregation nanocomposite research and scale-up.
Applications
Sensing and Detection
- Flexible strain sensors
- Plasmonic gas sensors
Sustainable Coatings & Packaging
- Photocatalytic, easy to clean surfaces
- High-barrier flexible packaging, pinhole-free plasma polymer coatings
Health and Antibacterial Surfaces
- Antibacterial and antifouling layers on membranes for water treatment
- Metal NPs for advanced cancer therapies and contrast agents
Photonics, Optics & Security
- Plasmonic absorbers e. g. for sensing, optic and decorative applications
- Photochromic security labels
Energy and Catalysis
- PEM & AEM fuel-cell and electrolyser catalyst layers for HER reaction
- Photothermal catalysis for NH3 cracking
SEM cross-section micrograph of multi-layer deposition with Ag-NPs and SiOx PECVD matrix
Deposition of Ag NPs SiOx nanocomposites over > 100 × 1250 mm (rotation mode)
TEM image of Pt NPs deposited by GFS with the LB nano system
μ-XRF homogeneity for Pt (rotation mode)
Schematic representation of the LB nano
Our offer
Synthesis of NPs
- Deposition of plasma polymer layers
- Deposition of multilayers and gradient layers with varying fill-factors
on a wide variety of possible substrates:
- Flat substrates (340 × 100 mm)
- Polymer foils (200 mm width)
- Collection medium (Si, cellulose, PDMS)
Flexible choice of materials for the nanocomposite thin films deposition:
- Inorganic NPs (metals, semiconductors, oxides, inorganic compounds)
- Organic & inorganic matrix materials (plasma polymers, oxides, metals, amorphous layers)
Technologies
NP Source – PVD process
- Gas Flow Sputtering of any solid metal
- Reactive sputtering mode also possible
Matrix source – PECVD process
- VHF source for the embedding of nanoparticles in ceramic (PECVD) or organic (plasma polymer) matrix layers
- Monomer precursors: silicon or carbon-based compounds (i. e. Siloxane, Isoprene, fluorinated benzene)
Matrix source – PVD process
- Magnetron Sputter source for the deposition from solid target material
- Pulsed DC Reactive Sputter operation for the deposition of oxide and nitride matrix layers, HF sputtering possible
Safe and Sustainable by Design (SSbD)
- Validated 3-tier NP-exposure protocol, documented NP concentrations and lung deposition modelling for usual materials
- Most comprehensive GFS operator safety dataset in Europe, providing regulatory base required for SSbD compliance