Fraunhofer Institute for Electron Beam
and Plasma Technology FEP
Fraunhofer Institute for Electron Beam
and Plasma Technology FEP

MAXI

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The "MAXI" in-line vacuum coating system for sheets and metal strips from Fraunhofer FEP offers a state-of-the-art solution for the efficient coating of thin metal strips and sheets.

It overcomes challenges such as plastic deformation and critical tensile loads through special pre-cleaning, pre-treatment, cooling and post-treatment. The system enables the precise deposition of thin films in a continuous process, ensuring high production speeds and consistent quality.

The combination of vacuum technology and advanced coating processes means that a wide range of materials can be optimally processed. The MAXI system also offers flexibility in adjusting the coating parameters to meet the specific requirements of different applications.

Ideal for industry and research, this technology contributes to the development of new products and applications. Discover the possibilities of the MAXI system and benefit from state-of-the-art coating technology.

Electron beam evaporation
SAD process
Pulse Magnetron Sputtering

Coating processes

  • High-rate electron beam evaporation
  • Evaporation of metals, compounds, alloys
  • Plasma-activated deposition processes (SAD and HAD)
  • Reactive deposition processes
  • Pulse magnetron sputtering
  • Other PVD processes (e. g. jet evaporation)
  • PECVD processes

Technical specifications

General modularly built 8-chamber equipment
General dimensions length / width / height: 14 m / 2.5 m / 4m
Coating width up to 500 mm
Substrate speed 0.001 … 1.0 m/s
Strip dimensions
  • width up to 300 mm
  • thickness 0.015 mm ... 1.5 mm
  • weight of coil up to 1000 kg
Sheet dimensions
  • size up to 500 mm × 500 mm
  • weight up to 15 kg
1st electron beam gun power maximum 160 kW
2nd electron beam gun power maximum 300 kW
Additional equipment
  • heater, power maximum 60 kW
  • different ion etchers, power maximum 30 kW
  • dual magnetron sputter system, power maximum 30 kW
  • power supply for plasma activation, arc current max. 3000 A
  • magnetic trap for the EB coating of temperature sensitive substrates
  • turn-over device for double side coating of sheets
  • XRF thickness distribution measurement system
  • optical film thickness measurement system by using acromatic light
XRF thickness distribution measurement system
Radiation heater
Post-treatment station
Winding station 1
High-power electron beam gun

Applications / Functions

Corrosion-resistant coatings ZnMg, Ti, Al, Cr, Cu, Sn, Zn
Decorative coatings TiN, Cr, Ti, TiO2
Transparent abrasion-resistant coatings SiOX, Al2O3
Hard coatings TiN, TiC, a-C, WC, Al2O3, a-C(:H) (:Ti/W)
Insulating coatings SiOX, Al2O3
Conductive coatings Al, Cu, Sn, Mo
Brazing and welding layers Cu, Sn, Si
Photo catalytic layers TiO2
Solar absorption layers Ti- or Cr-based cermets
Conversion layers SiOX
High-reflective layers SiO2, TiO2
Special function layers Al, Cu, Sn

Further information