Fraunhofer Institute for Electron Beam
and Plasma Technology FEP
Fraunhofer Institute for Electron Beam
and Plasma Technology FEP

Analytics

The Materials Science / Analytics department at Fraunhofer FEP has a wide range of methods at its disposal for characterizing thin films and surfaces. The methods and extensive analytical experience of our employees are available without restriction for product and technology development within our institute and as a service for our customers. Typical fields of application are coatings for optics, sensor technology, displays, photovoltaics, packaging, corrosion and wear protection.

Structure and microstructure

  • FE scanning electron microscope (FE-REM), SU8000 (Hitachi)
  • Ion preparation of cross sections, Cross Section Polisher SM-09010 (JEOL)
  •  Metallographic preparation technique (Struers) and light microscope Polyvar 2 Met (Reichert)
Fracture and surface of an Al2O3 hard material layer
Fracture and surface of an Al2O3 hard material layer
Microstructure of an AlN layer for piezoelectric applications
Microstructure of an AlN layer for piezoelectric applications
Ion-prepared cross-section of a CdTe solar cell
Ion-prepared cross-section of a CdTe solar cell

Chemical composition

  • Energy dispersive spectrometry of X-rays (EDS), Apollo XV (EDAX)
  • Optical glow discharge spectrometry (GD-OES), GD-Profiler 2 (HORIBA Jobin Yvon)
EDS spectrum of an AlOxNy layer
EDS spectrum of an AlOxNy layer
GD-OES intensity-time profile of a solar protection system with 5 × 10 nm silver layers
GD-OES intensity-time profile of a solar protection system with 5 × 10 nm silver layers
GD-OES concentration-depth profile of a transparent and conductive ITO layer
GD-OES concentration-depth profile of a transparent and conductive ITO layer

Topography, surface and layer thickness

  • Atomic force microscopy (AFM), Explorer (Topometrix)
  • Profilometry, P15-LS (Tencor)
  • Calotest (CSEM)
  • Contact angle, OCA 20 (Data Physics)
AFM image of the surface of an FTO film
AFM image of the surface of an FTO film
Profilometry roughness scan of a PET film
Profilometry roughness scan of a PET film
AFM image of the surface of a very smooth SiO2 layer
AFM image of the surface of a very smooth SiO2 layer

Permeation barrier

  • Water vapour transmission rate (WVTR) according to DIN EN ISO 15106-03, WDDG (Brugger Feinmechanik); Measuring range 10-3 to 10 g/(m2d)
  • Water vapour permeability, HiBarSens (Sempa); Measuring range 10-6 to 10-3 g/(m2d)
  • Oxygen permeability (OTR) according to DIN 53380-3 and ASTM D 3985-05, OX-TRAN 2/20 (Mocon); Measuring range 0.1 to 200 cm3/(m2d bar)

Optical, mechanical and electrical properties

  • Spectroscopic ellipsometry SE850 (SENTECH)
  • UV/VIS/NIR spectroscopy, Lambda 950 (Perkin Elmer)
  • Light scattering, Haze-guard plus (BYK-Gardner)

 

  • Hardness and modulus of elasticity, Nano Indenter XP (MTS)
  •  Layer stresses, Profilometer P15-LS (TENCOR)
  •  Adhesion strength by scratch test, MST4 (CSEM)
  • Abrasion resistance (Taber Abraser)

 

  • I-V characteristics of solar cells (Sun 300, LOT)
  • Quantum efficiency, Oriel IQE-200 (Newport)
  • Light and dark conductivity (SÜSS Prober and Keithley)
  • Four-peak measuring station, FPP 5000 (Veeco)
Determination of optical properties by spectroscopic ellipsometry (SE850; Sentech)
© Fraunhofer FEP
Determination of optical properties by spectroscopic ellipsometry (SE850; Sentech)
Determination of hardness and modulus of elasticity of thin films by nanoindentation (Nano Indenter XP; MTS)
© Fraunhofer FEP
Determination of hardness and modulus of elasticity of thin films by nanoindentation (Nano Indenter XP; MTS)
Determination of electrical conductivity (SÜSS Prober and Keithley)
© Fraunhofer FEP
Determination of electrical conductivity (SÜSS Prober and Keithley)

Corrosion and climate tests

  • Corrosion test system for condensation water and salt spray test, SKB 400 A-SC (Liebisch)
  • Climate chamber - 40 ... 150 °C with adjustable humidity, SH-241 (ESPEC)