Plasma surface technologies

Plasma-assisted coating processes enable the production of customized coatings for many areas of application. Our strength lies in qualifying these plasma-assisted coating processes for industrial production and the coating of large surfaces. The core competence includes the PVD processes of plasma-activated high-rate evaporation and pulse magnetron sputtering as well as PECVD processes for plasma-activated chemical vapour deposition with various high-performance plasma sources.

A unique selling point is the combination of extremely dense plasmas with extremely high deposition rates for the economical deposition of high-quality coatings. The combination of economic efficiency with precision in terms of process control and coating properties opens up new applications. For these coating processes, we also develop the cleaning processes and plasma pre-treatments required to ensure coating adhesion.

Our offer

Fraunhofer FEP offers comprehensive expertise in process and technology development for coating technologies and layer systems according to your application along the entire value chain:

  • Feasibility studies
  • Development of the coating technology and coating system for your product
  • Sample coatings
  • Development of key assemblies
  • Technology transfer to production
  • Support with system realization for our customers
  • Licensing

This development work is supplemented and supported by

  • Acquisition and coordination of projects subsidized by the state, the federal government and the European Union
  • Economic feasibility studies
  • Studies on the state of the art, e.g. literature and patent research

Applications

  • Realization of titanium dioxide coatings for photocatalysis applications
    • Self-cleaning and easy-to-clean surfaces
    • Antibacterial surfaces
    • Photocatalytic cleaning and reforming of gases or liquids by decomposition of organic molecules
  •  Realization of titanium dioxide coatings for photoinduced hydrophilicity
    • Anti-fogging surfaces 
    • for influencing initial processes   
  • Increasing the resistance to corrosion, scratching or wear of components by coating small and bulk parts as bulk material, anti-scratch or wear resistance of components by coating small and bulk parts as bulk material
  • Cleaning processes through plasma pre-cleaning and plasma etching processes
  • Corrosion protection layers for energy storage media
  • Transparent or metallic barrier layers
  • Insulation layers or conductive layers
  • Thin films for energy storage media
    • Metallized polymer films as current collectors
    • Solid-state electrolyte layers
    • Powder-based Si anode material
  • Anti-reflective polymer films through roll-to-roll plasma etching
    • for architectural glazing
    • for thermal collectors, Photovoltaics
    • for displays or precision optical systems

FOCUS: Plasma etching processes for polymer films with Anti-Reflective Properties - PolAR

© Fraunhofer FEP
SEM image of a PET surface etched with PolAR technology

Fraunhofer FEP has developed innovative methods for the efficient anti-reflective treatment of films. By utilizing a proven plasma etching process, which has already been tested in the production of small and compact optical components, continuous processing in a roll-to-roll process is now made possible.

Our facilities

 

Cluster 300

Test facility for stationary magnetron sputtering of flat substrates with a diameter of up to 300 mm

 

ERICA

Cluster system for complex coating and structuring processes in vacuum

 

UNIVERSA

Batch system for coating 3D substrates

 

 

MAXI

In-line vacuum coating system for sheets and metallic strips

 

VERSA

Test facility for plasma-activated electron beam evaporation

 

ILA 900

Vertical in-line sputter system

 

ILA 750

Vertical in-line sputter system

 

ALMA 1000

Test facility for bulk coating using plasma-activated high-rate evaporation

Laboratory Test Facilities

LB9, LBnano