Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP
Laboratory plant for electron beam evaporation
Vacuum coating plant with a high-power electron beam (100 kW) for evaporation and remelting under variable conditions
Typical substrate
- coating of sheets of metal, plastic, glass and ceramics having maximum dimensions of 100 × 200 mm
- coating of three-dimensional components
Range of applications
- feasibility studies
- technology development, in particular new plasma processes for high-rate deposition and substrate pre-treatment
- development of new PVD layer systems
- fundamental studies on electron beam evaporation
- testing key components under near-practical conditions