Laboratory plant for electron beam evaporation

Vacuum coating plant with a high-power electron beam (100 kW) for evaporation and remelting under variable conditions

Typical substrate

  • coating of sheets of metal, plastic, glass and ceramics having maximum dimensions of 100 × 200 mm
  • coating of three-dimensional components

Range of applications

  • feasibility studies
  • technology development, in particular new plasma processes for high-rate deposition and substrate pre-treatment
  • development of new PVD layer systems
  • fundamental studies on electron beam evaporation
  • testing key components under near-practical conditions