Workshop / November 03, 2025 - November 05, 2025
International Workshop on Piezo MEMS 2025
Poster presentation
Digitalization of magnetron sputter processes for deposition of piezoelectric thin films
Tuesday, November 4
Konferenzteilnahme / Conference participation
Digitalization of magnetron sputter processes for deposition of piezoelectric thin films
Tuesday, November 4
Himeji, Japan
November 03, 2025 - November 05, 2025