Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP
Plant for coating small components as bulk products
Prototype of a vapor deposition plant for coating small components that are handled as bulk products. It is equipped with:
- two boat evaporators,,
- two hollow cathode sources for plasma activation;
- a unit for agitating and centrifugal positioning of the bulk product in a rotating drum
Typical substrate
- coating of small substrates, which are handled as bulk products, having typical dimensions 5 × 5 × 5 mm3.
Range of applications
- technology development and process development
- feasibility studies
- sample coatings