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Fraunhofer Institute for Electron Beam
and Plasma Technology FEP
Fraunhofer Institute for Electron Beam
and Plasma Technology FEP
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About us
Projects
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Technologies and Services
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Technologies and Services
Electron beam technologies
Sputtering technologies
Plasma surface technologies
PolAR
Technological Key Components
Roll-to-roll Competence Centre
Sheet-to-sheet Competence Centre
Flash Lamp Annealing
Flexible Glass
Single substrate coating
3D coating
Analytics
Biomedical laboratory complex
Industry Solutions
[X]
Industry Solutions
Energy and sustainability
Life Sciences
Cleaning, disinfection and sterilization
Coatings for implants and medical products
Surface modification
Tissue preparation
Vaccine inactivation
Sensors and diagnostics
Coatings for medical applications
Environmental technologies
Smart Building
Mobility
Optics, sensors and electronics
Smart Farming
Packaging
Mechanical engineering
Cultural heritage management
Future topics
Digitalization
Sputter epitaxy
Plasma chemistry
Equipment
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Equipment
Sheet-to-Sheet In-line Equipment
ILA 750
ILA 900
MAXI
PreSensLine
Roll-to-Roll In-line Equipment
atmoFlex
coFlex
labFlex
MAXI
novoFlex
Roll-to-roll inspection system
Single Substrate Coating Equipment
CLUSTER 300
EMO
VERSA
3D Coating Equipment
ALMA 1000
NOVELLA
UNIVERSA
Further Process Equipment
EFFI
ERICA
REAMODE
TABEA
Media Centre
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Media Centre
Publications
Annual reports
Annual Report 2019/20
Annual Report 2020/21
Annual Report 2022/23
Annual Report 2023/24
Annual Report 2024/25
Brochures
Dissertations
Events
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Events
pro flex 2027
Jobs
Contact
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Homepage
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Publications
Brochures
Brochures
Profile
Fraunhofer FEP in profile [ PDF 1.04 MB ]
Experimental and pilot plants
ALMA 1000 – Experimental plant for coating bulk goods [ PDF 0.65 MB ]
Roll-to-roll pilot wet coating line – atmoFlex 1250 [ PDF 0.69 MB ]
CLAIRE – In-line plant for wet chemical surface treatment prior to coating [ PDF 2.67 MB ]
CLUSTER 300 – Experimental plant for stationary magnetron sputtering [ PDF 0.68 MB ]
Roll-to-roll pilot sputter roll coater – coFlex 600 [ PDF 0.53 MB ]
Electron beam machine for surface structuring and for fine and micro welding processes – EFFI [ PDF 0.53 MB ]
EMO – Laboratory coater with electron beam evaporator [ PDF 0.56 MB ]
ERICA – Vacuum cluster tool for complex coating and structuring processes [ PDF 2.49 MB ]
ILA 750 – Vertical in-line sputtering plant [ PDF 0.47 MB ]
Vertical in-line sputtering plant for coating large surfaces – ILA 900 [ PDF 1.4 MB ]
Roll-to-roll laboratory coating system – labFlex 200 [ PDF 0.42 MB ]
LB9 – Laboratory coater [ PDF 0.4 MB ]
In-Line vacuum coating equipment for sheets and metal strips – MAXI [ PDF 1.74 MB ]
NOVELLA – Pilot plant for the coating of components [ PDF 0.56 MB ]
Roll-to-roll pilot web coater – novoFlex 600 [ PDF 3 MB ]
PreSensLine – In-line sputtering system for precision coating of large substrates [ PDF 0.57 MB ]
REAMODE – Experimental equipment for modifying organic materials [ PDF 1.12 MB ]
Roll-to-roll inspection system [ PDF 0.48 MB ]
UNIVERSA – Laboratory Coater for Layer Deposition [ PDF 0.68 MB ]
Pilot plant for plasma-activated electron beam vapor deposition – VERSA [ PDF 0.5 MB ]
Business units
Coating of flat substrates [ PDF 0.44 MB ]
Coating of flexible products [ PDF 0.54 MB ]
Coating of metal sheets and strips [ PDF 0.5 MB ]
Precision coating [ PDF 0.98 MB ]
Hardware
Double Ring Magnetron DRM 400 – High-rate sputtering with superiour process control [ PDF 3.16 MB ]
Easy Beam – Electron beam source for high-rate evaporation [ PDF 0.56 MB ]
LAVOPLAS [ PDF 0.71 MB ]
UBS-C2 – Unipolar/Bipolar switching unit for pulse magnetron sputtering [ PDF 0.35 MB ]
Products
Advanced transparent conductive coatings on flat and flexible substrates [ PDF 0.64 MB ]
Clear barrier films for packaging applications [ PDF 0.5 MB ]
Coating of small and mass-produced components as bulk goods [ PDF 0.6 MB ]
Decellularization, UVA treatment, Sterilization [ PDF 0.42 MB ]
Electrically insulating coatings [ PDF 0.47 MB ]
Electron beam curing of lacquers [ PDF 0.48 MB ]
Electron beam modification of polymers [ PDF 0.46 MB ]
Electron treatment of seeds [ PDF 3.02 MB ]
Energy Harvesting [ PDF 0.37 MB ]
Functionalized ultra-thin flexible glass [ PDF 1.08 MB ]
Refinement of thin-films by in-line flash lamp annealing [ PDF 1.42 MB ]
Restoration of historical mirrors [ PDF 0.67 MB ]
Silver and Copper - together effective against bacteria [ PDF 0.45 MB ]
Sterilization of biological tissues with electrons [ PDF 0.36 MB ]
Surface modification for medical engineering [ PDF 0.39 MB ]
Thin-film corrosion sensors for monitoring of sensitive objects [ PDF 0.42 MB ]
Transparent, scratch-resistant layers on large area substrates [ PDF 0.65 MB ]
Services
Characterization of thin films and surfaces [ PDF 1.51 MB ]
Technologies
Electrical contact layers of molybdenum for CIS and CIGS cells [ PDF 0.53 MB ]
High-rate deposition of pure silicon layers [ PDF 0.47 MB ]
Plasma-activated high-rate deposition [ PDF 0.9 MB ]
Pulse Magnetron Sputtering [ PDF 0.4 MB ]
Sputter etching [ PDF 0.58 MB ]
Surface technologies for medical applications [ PDF 1.28 MB ]
Ultra high-rate PECVD for large area applications [ PDF 0.66 MB ]
Topics
Flexible Permeation Barriers [ PDF 0.39 MB ]
Technologies for automotive industry [ PDF 1.36 MB ]
Thin film technology for energy storage media [ PDF 2.79 MB ]
White Paper
Preliminary cytocompatibility studies for encapsulated OLEDs [ PDF 0.49 MB ]
Fraunhofer Institute for Electron Beam